Electric Holding Furnace 1000 ordm C Mbf100-10 CVD Furnace Box Furnace Melting Furnace Industrial Furnace for Industrial
1.Equipment Name and Model: MBF100-10 Type Chemical Vapor Deposition Furnace.
2.Technical Specifications and Basic Configuration
- Rated Temperature: 750°C
- Maximum Temperature: 1000°C
- Heating Zone Dimensions: 770 × 770 × 300 mm (W × D × H)
- Effective Dimensions: 640 × 640 × 250 mm (W × D × H)
- Outer Chamber Material: SUS310S
- Inner Liner Material: Fused Quartz
- Product Size: Φ120
- Equipment Capacity: 16 substrates per batch
- Maximum Heating Power: 16 kW
- Heating Method: Bottom + Four Sides (Five-Sided Heating)
- Temperature Control Points: Bottom + Side, 2 points in total
- Thermocouple Type: K-Type
- Heating Rate: ≤8°C/min
- Heating Elements: FEC Ceramic Fiber Heaters
- Furnace Door Opening Method: Top-Opening Design
- Temperature Control Stability: ±1°C
- Temperature Control Instrument: Imported PID Controller with Auto-Tuning Function
- Program Steps: 20 steps
- Alarm and Protection: Over-temperature, thermocouple breakage, and other audible/visual alarms, with over-temperature power-off protection.
- Surface Temperature Rise: <35ºC.
- Weight: about 500kg.
- Furnace Dimensions: about 1200×1200×1500mm (W×H×D);
- Appearance Color: light gray.
| 3. Delivery List |
| | Item | Note | QTY |
| Basic Compositions | Furnace | | 1 unit |
| Certificates of Inspection | Furnace and major purchased components | 1 Set |
| Technical Documents | Furnace specifications, technical documents of major purchased components, etc | 1 Set |
| Key Parts | Mass Flow Controller (MFC) | Yamatake or HORIBA | 4 Set |
| Touch screen | | 1 PC |
| Temperature Controller | | 1 Set |
| FEC Heater | | 1 Set |
| Quartz Liner | | 1 Set |
| Spares | SSR | | 1 PC |
4. Facility Requirements 4.1 Environmental conditions: Temperature 0 - 40ºC, humidity ≤ 80% RH, no corrosive gas, no strong
airflow disturbance.
4.2 Ground requirements: level, no obvious vibration, bearing capacity > 500Kg/m2 .
4.3 Power conditions: capacity greater than 22kVA, 3 phases 5 lines, voltage 220/380V, frequency
50Hz(according to local situation). Live wire: yellow, green, red, neutral wire: blue, ground wire: yellow-green;
4.4 Installation site: 1500mm×1500mm×3000mm (W×H×D), installation area greater than 2.5m2.
