Nitrogen Atmosphere Medium-Temperature Heat Treatment Mbf100-10 Type Chemical Vapor Deposition CVD Furnace for Industrial
1.Overview:
The MBF100-10 Type Chemical Vapor Deposition (CVD) Furnace is suitable for medium-temperature heat treatment of electronic products. It is primarily used for gas-phase reaction processes of related materials in atmospheres of nitrogen, helium, acetylene, and hydrogen. It can also be utilized for sintering processes of related materials under protective atmospheres.The furnace is fully equipped and installed with a real-time computer monitoring system, making it particularly suitable for material process testing requirements in research institutes.
2.Technical Specifications and Basic Configuration
- Product model:MBF100-10
- Rated Temperature: 750°C
- Maximum Temperature: 1000°C
- Heating Zone Dimensions: 770 × 770 × 300 mm (W × D × H)
- Effective Dimensions: 640 × 640 × 250 mm (W × D × H)
- Heating Element: FEC Ceramic Fiber Heater.
- Exhaust System: Exhaust port located below the furnace chamber.
- Inner Lining Material: Fused Quartz.
- Cooling Method: Natural cooling with the furnace.
- Temperature Control Points: 2 independent temperature control points.
- Temperature Stability: ±1°C, imported temperature controller with PID auto-tuning function.
- Control Method: Touch screen + PLC centralized control.
- Alarm Protection: Audible and visual alarms for over-temperature and thermocouple breakage, with over-temperature alarm and power-off protection function.
- Surface Temperature Rise: <35ºC.
- Weight: about 500kg.
- Furnace Dimensions: about 1200×1200×1500mm (W×H×D).
| 3. Delivery List |
| | Item | Note | QTY |
| Basic Compositions | Furnace | | 1 unit |
| Certificates of Inspection | Furnace and major purchased components | 1 Set |
| Technical Documents | Furnace specifications, technical documents of major purchased components, etc | 1 Set |
| Key Parts | Mass Flow Controller (MFC) | Yamatake or HORIBA | 4 Set |
| Touch screen | | 1 PC |
| Temperature Controller | | 1 Set |
| FEC Heater | | 1 Set |
| Quartz Liner | | 1 Set |
| Spares | SSR | | 1 PC |
4. Facility Requirements 4.1 Environmental conditions: Temperature 0 - 40ºC, humidity ≤ 80% RH, no corrosive gas, no strong
airflow disturbance.
4.2 Ground requirements: level, no obvious vibration, bearing capacity > 500Kg/m2 .
4.3 Power conditions: capacity greater than 22kVA, 3 phases 5 lines, voltage 220/380V, frequency
50Hz(according to local situation). Live wire: yellow, green, red, neutral wire: blue, ground wire: yellow-green;
4.4 Installation site: 1500mm×1500mm×3000mm (W×H×D), installation area greater than 2.5m2.
