Vacuum Vertical Tube Furnace Vtf1050-05 for Industrial Applications at 500 ordm C in Vacuum Atmosphere
1. Equipment Name and Model:
VTF1050-05 Vacuum Vertical Tube Furnace
2. Technical Indicators and Basic Configuration
2.1 Rated Temperature: 450°C;
2.2 Maximum Temperature: 500°C;
2.3 Furnace Tube Dimensions: φ100 (OD) mm × φ94 (ID) mm × 800 mm, made of quartz;
2.4 Heating Element: Ceramic fiber heater;
2.5 Number of Temperature Zones: 1;
2.6 Length of the Temperature Zone: 500 mm;
2.7 Temperature Control Stability: ±1°C, with PID parameter self-tuning function;
2.8 Temperature Control Thermocouple: K graduation;
2.9 Number of Temperature Control Points: 1;
2.10 Alarm and Protection: Acoustic and optical alarm protection for over-temperature, broken thermocouple, low air pressure, etc., interlock between the heating and the heating component switch, and it has the function of over-temperature alarm and heating cut-off protection;
2.11 Maximum Heating Power: 3 kW;
2.12 Typical Insulation Power of the Empty Furnace: ≤1.5 kW;
2.13 Ultimate Vacuum Degree: ≤10 Pa;
2.14 Pumping Rate: Pump to 100 Pa within 2 minutes;
2.15 Surface Temperature Rise: < 35°C;
2.16 Equipment Weight: Approximately 120 kg;
2.17 External Color of the Equipment: Gray, color number RAL7047;
2.18 Reference Dimensions of the Appearance: 450 mm × 1100 mm × 840 mm (Width × Height × Depth).
3. Structural Design
The equipment uses a ceramic fiber FEC heating module for surrounding heating, a high-purity quartz furnace tube, and double-layer stainless steel sealing flanges at both ends. The specially designed flange support structure ensures the positioning of the quartz tube in the vertical direction. The top flange is equipped with a dynamic sealing structure. The product suspension rod achieves vacuum sealing through the dynamic sealing structure and can move up and down and rotate. A support rod is installed at the top of the frame, and the suspension rod can be hung on the support rod after being lifted. The product hanging tray is installed on the suspension rod, and the spacing can be adjusted freely. A tray is provided at the bottom of the suspension rod to hold the fallen process products. Two process holes are reserved on the flange. When the protective gas is filled into the furnace tube to a slightly positive pressure, the valve can be opened for relevant process operations.
The heating component is designed to be openable and closable, which is convenient for the cleaning and replacement of the quartz tube. At the same time, opening the heating component can greatly increase the cooling rate of the equipment, reduce the overall process time of the product, and improve the operating efficiency of the equipment. The opening and closing of the heating component are interlocked with the on-off of the heater, that is, when the heating component is opened, the heating is immediately cut off.
An independent control cabinet is installed at the rear of the equipment. Control components, pneumatic components, vacuum pumps and other electrical components are all placed in the control cabinet.
A rotary vane vacuum pump is used as the vacuum acquisition device, and a mechanical pressure gauge is used to detect the pressure inside the furnace tube. The intake air flow is controlled by a glass rotor flowmeter, with a range of 1 to 10 LPM.
| 3.Delivery Checklist |
| | Name | Main Contents | Quantity |
| Basic Components | Furnace Main Uni | | 1 unit |
| Inspection Certificates | Certificates for key purchased components | 1 set |
| Technical Documents | User manual, technical documents for key purchased components, etc. | 1 set |
| Key Components | FEC Heater | | 1 set |
| Temperature Controller | | 1 set |
| Vacuum Gauge + Pirani Gauge | | 1 set |
| Vacuum Pump | | 1 set |
| Spare Parts | Solid-State Relay (SSR) | | 1 piece |
